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Reliability of micro-electro-mechanical systems (MEMS)

著者名:
掲載資料名:
Reliability, testing, and characterization of MEMS/MOEMS : 22-24 October 2001, San Trancisco, USA
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
4558
発行年:
2001
開始ページ:
197
終了ページ:
205
総ページ数:
9
出版情報:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819442864 [0819442860]
言語:
英語
請求記号:
P63600/4558
資料種別:
国際会議録

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