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Physical and reliability issues in MEMS microrelays with gold contacts

著者名:
掲載資料名:
Reliability, testing, and characterization of MEMS/MOEMS : 22-24 October 2001, San Trancisco, USA
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
4558
発行年:
2001
開始ページ:
11
終了ページ:
21
総ページ数:
11
出版情報:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819442864 [0819442860]
言語:
英語
請求記号:
P63600/4558
資料種別:
国際会議録

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