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Agile micromirrors with three degrees of freedom manufactured with liquid MEMS technology

著者名:
Feinerman,A.D. ( Univ. of Illinois/Chicago )
Friedman,G.
Kasman,E.
Montgomery,J.
Patel,P.R.
Megaridis,C.M.
Howell,E.
Collicott,S.H.
さらに 3 件
掲載資料名:
Free-space laser communication and laser imaging : 30-31 July 2001 San Diego, USA
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
4489
発行年:
2001
開始ページ:
166
終了ページ:
176
総ページ数:
11
出版情報:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819442031 [0819442038]
言語:
英語
請求記号:
P63600/4489
資料種別:
国際会議録

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