Dual-fiber optic microcantilever proximity sensor
- 著者名:
- Goedeke,S.M. ( Oak Ridge National Lab. )
- Allison,S.W.
- Farahi,R.H.
- Rajic,S.
- Datskos,P.G.
- 掲載資料名:
- Engineering thin films with ion beams, nanoscale diagnostics, and molecular manufacturing : 30-31 July 2001, San Diego, USA
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 4468
- 発行年:
- 2001
- 開始ページ:
- 161
- 終了ページ:
- 170
- 総ページ数:
- 10
- 出版情報:
- Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819441829 [0819441821]
- 言語:
- 英語
- 請求記号:
- P63600/4468
- 資料種別:
- 国際会議録
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8
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