Ion beam nanosmoothing of sapphire and silicon carbide surfaces

Ion beam nanosmoothing of sapphire and silicon carbide surfaces

著者名:

Fenner,D.B. ( Epion Corp. )

掲載資料名:

Engineering thin films with ion beams, nanoscale diagnostics, and molecular manufacturing : 30-31 July 2001, San Diego, USA

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

4468

発行年:

2001

開始ページ:

17

終了ページ:

24

総ページ数:

8

出版情報:

Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819441829 [0819441821]

言語:

英語

請求記号:

P63600/4468

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00012182
シリーズID:	PA00000029
会議名:	Optics & Photonics : Engineering thin films with ion beams, nanoscale diagnostics, and molecular manufacturing
回次:	2001
会議開催地:	San Diego, CA, USA
会議開催年:	2001.07.30-2001.07.31

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