IR spectroscopic ellipsometry for industrial characterization of semiconductors
- 著者名:
Boher,P. ( SOPRA S.A. ) Bucchia,M. Piel,J.P. Defranoux,C. Stehle,J.L. Pickering,C. - 掲載資料名:
- Optical metrology roadmap for the semiconductor, optical, and data storage industries II : 2-3 August 2001 San Diego, USA
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 4449
- 発行年:
- 2001
- 開始ページ:
- 69
- 終了ページ:
- 78
- 総ページ数:
- 10
- 出版情報:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819441638 [0819441635]
- 言語:
- 英語
- 請求記号:
- P63600/4449
- 資料種別:
- 国際会議録
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