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Optical characterization of MEMS deformable mirror array structures

著者名:
掲載資料名:
Surface scattering and diffraction for advanced metrology : 1 August 2001 San Diego, USA
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
4447
発行年:
2001
開始ページ:
65
終了ページ:
76
総ページ数:
12
出版情報:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819441614 [0819441619]
言語:
英語
請求記号:
P63600/4447
資料種別:
国際会議録

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