Design and detection of superprecision positioning stage with nanometer resolution
- 著者名:
- 掲載資料名:
- Optomechanical design and engineering 2001 : 2-3 August 2001, San Diego, USA
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 4444
- 発行年:
- 2001
- 開始ページ:
- 350
- 終了ページ:
- 357
- 総ページ数:
- 8
- 出版情報:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819441584 [0819441589]
- 言語:
- 英語
- 請求記号:
- P63600/4444
- 資料種別:
- 国際会議録
類似資料:
SPIE-The International Society for Optical Engineering |
Society of Photo-optical Instrumentation Engineers |
SPIE-The International Society for Optical Engineering |
American Institute of Chemical Engineers |
SPIE-The International Society for Optical Engineering |
Trans Tech Publications |
SPIE-The International Society for Optical Engineering |
Electrochemical Society |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
6
国際会議録
Detection and active stabilization of beams position at a high-resolution laser interferometer
Society of Photo-optical Instrumentation Engineers |
Society of Photo-optical Instrumentation Engineers |