Combined polarizing interferometer and optical beam deflection system for MEMS characterization
- 著者名:
Jenkins,D.F.L. ( Univ. of Plymouth ) Clegg,W.W. Liu,X. Tunstall,G. Cattan,E. Remiens,D. Liu,B. - 掲載資料名:
- Novel optical systems design and optimization IV : 1-2 August , 2001, San Diego, USA
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 4442
- 発行年:
- 2001
- 開始ページ:
- 15
- 終了ページ:
- 25
- 総ページ数:
- 11
- 出版情報:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819441560 [0819441562]
- 言語:
- 英語
- 請求記号:
- P63600/4442
- 資料種別:
- 国際会議録
類似資料:
SPIE-The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
4
国際会議録
Prism coupling as a non-destructive tool for optical characterization of (Al,Ga) nitride compounds
MRS-Materials Research Society |
SPIE - The International Society of Optical Engineering |
MRS - Materials Research Society |
SPIE - The International Society for Optical Engineering |
6
国際会議録
Characterization by X-ray diffraction of PZT(Pb(ZrxTi1-x)O3)thin films on Pt/TiN/BPSG/Si substrate
Trans Tech Publications |
SPIE-The International Society for Optical Engineering |