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Synthesis of pure C40 TiSi2 for Si wafer fabrication

著者名:
Chen,S.Y. ( National Univ. of Singapore )
Shen,Z.X.
Xu,S.Y.
See,A.K.
Chan,L.H.
Li,W.S.
さらに 1 件
掲載資料名:
Second International Symposium on Laser Precision Microfabrication : 16-18 May 2001, Singapore
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
4426
発行年:
2001
開始ページ:
272
終了ページ:
275
総ページ数:
4
出版情報:
Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819441379 [0819441376]
言語:
英語
請求記号:
P63600/4426
資料種別:
国際会議録

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