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Electron cyclotron resonance plasma-assisted pulsed laser deposition of carbon nitride thin films

著者名:
Shi,W. ( Fudan Univ. )
Wu,J.D.
Sun,J.
Ling,H.
Ying,Z.F.
Zhou,Z.Y.
Li,F.M.
さらに 2 件
掲載資料名:
Second International Symposium on Laser Precision Microfabrication : 16-18 May 2001, Singapore
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
4426
発行年:
2001
開始ページ:
237
終了ページ:
240
総ページ数:
4
出版情報:
Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819441379 [0819441376]
言語:
英語
請求記号:
P63600/4426
資料種別:
国際会議録

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