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Interferometric method for in-situ characterization of coating industrial processes

著者名:
掲載資料名:
Laser metrology for precision measurement and inspection in industry : 13-15 October 1999, Florianópolis, Brazil
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
4420
発行年:
1999
開始ページ:
59
終了ページ:
69
総ページ数:
11
出版情報:
Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819441270 [0819441279]
言語:
英語
請求記号:
P63600/4420
資料種別:
国際会議録

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