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Multipoint process monitoring system based on an acousto-optic tunable filter (AOTF)

著者名:
Kim,D. ( Korea Advanced Institute of Science and Technology )
You,J.W.
Kim,S.H.
Kong,H.J.
Lee,Y.W.
Chegal,W.
Kwak,Y.K.
さらに 2 件
掲載資料名:
Optical engineering for sensing and nanotechnology (ICOSN 2001) : 6-8 June 2001, Yokohama, Japan
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
4416
発行年:
2001
開始ページ:
202
終了ページ:
206
総ページ数:
5
出版情報:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819441218 [081944121X]
言語:
英語
請求記号:
P63600/4416
資料種別:
国際会議録

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