In-situ single-wavelength ellipsometer for a vacuum chamber
- 著者名:
Chegal,W. ( Korea Advanced Institute of Science and Technology ) Ye,S. Cho,H.M. Lee,Y.W. Kim,S.H. Kwak,Y.K. - 掲載資料名:
- Optical engineering for sensing and nanotechnology (ICOSN 2001) : 6-8 June 2001, Yokohama, Japan
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 4416
- 発行年:
- 2001
- 開始ページ:
- 15
- 終了ページ:
- 18
- 総ページ数:
- 4
- 出版情報:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819441218 [081944121X]
- 言語:
- 英語
- 請求記号:
- P63600/4416
- 資料種別:
- 国際会議録
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