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Design and coupled-effect simulations of CMOS micro gas sensors built on SOI thin membranes

著者名:
Lu,C.-C. ( Univ. of Cambridge )
Udrea,F.
Gardner,J.W.
Setiadi,D.
Dogaru,T.
Tsai,T.H.
Covington,J.A.
さらに 2 件
掲載資料名:
Design, test, integration, and packaging of MEMS/MOEMS 2001 : 25-27 April 2001, Cannes, France
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
4408
発行年:
2001
開始ページ:
86
終了ページ:
95
総ページ数:
10
出版情報:
Bellingham, Washington: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819441096 [0819441090]
言語:
英語
請求記号:
P63600/4408
資料種別:
国際会議録

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