Coplanar waveguides on SOI and OPS substrates
- 著者名:
Gamble,H.S. ( Queen's Univ. of Belfast ) Leong,K.O. Raza,S.H. Armstrong,B.M. Mitchell,S.J.N. Yang,S. Fusco,V.F. Stewart,J.A.C. - 掲載資料名:
- MEMS design, fabrication, characterization, and packaging : 30 May-1 June 2001, Edinburgh, UK
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 4407
- 発行年:
- 2001
- 開始ページ:
- 363
- 終了ページ:
- 371
- 総ページ数:
- 9
- 出版情報:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819441089 [0819441082]
- 言語:
- 英語
- 請求記号:
- P63600/4407
- 資料種別:
- 国際会議録
類似資料:
Electrochemical Society |
SPIE-The International Society for Optical Engineering |
Electrochemical Society |
Materials Research Society |
Electrochemical Society |
9
国際会議録
Fabrication and characterisation of Silicon On Insulator substrates incorporating thermal vias.
Kluwer Academic Publishers |
Electrochemical Society |
Electrochemical Society |
SPIE-The International Society for Optical Engineering |
Electrochemical Society |
SPIE-The International Society for Optical Engineering |
Electrochemical Society |