Nd:YAG laser micromachining of SiC precision structures for MEMS
- 著者名:
- Kreutz,E.W. ( Rheinisch-Westfalische Technische Hochschule Aachen )
- Weichenhain,R.
- Horn,A.
- 掲載資料名:
- MEMS design, fabrication, characterization, and packaging : 30 May-1 June 2001, Edinburgh, UK
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 4407
- 発行年:
- 2001
- 開始ページ:
- 109
- 終了ページ:
- 118
- 総ページ数:
- 10
- 出版情報:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819441089 [0819441082]
- 言語:
- 英語
- 請求記号:
- P63600/4407
- 資料種別:
- 国際会議録
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