Etch selectivity of a wet chemical formulation for premetal cleaning

Etch selectivity of a wet chemical formulation for premetal cleaning

著者名:

Epton,J.W. ( Rockwood Electronic Materials )
Jarrett,D.L.
Doohan,I.J.

掲載資料名:

Process and equipment control in microelectronic manufacturing II : 30-31 May, 2001, Edinburgh, UK

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

4405

発行年:

2001

開始ページ:

105

終了ページ:

116

総ページ数:

12

出版情報:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819441065 [0819441066]

言語:

英語

請求記号:

P63600/4405

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00012121
シリーズID:	PA00000029
会議名:	Microelectronic Manufacturing Technologies : Process and Equipment Control in Microelectronic Manufacturing
回次:	2001 : 2nd
会議開催地:	Edinburgh, UK
会議開催年:	2001.05.30-2001.05.31

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