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Characterization of ultrathin gate dielectrics using combined grazing x-ray reflectance and spectroscopic ellipsometry

著者名:
掲載資料名:
Process and equipment control in microelectronic manufacturing II : 30-31 May, 2001, Edinburgh, UK
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
4405
発行年:
2001
開始ページ:
44
終了ページ:
55
総ページ数:
12
出版情報:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819441065 [0819441066]
言語:
英語
請求記号:
P63600/4405
資料種別:
国際会議録

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