High-resolution proximity printing by wave-optically designed complex transmission masks

High-resolution proximity printing by wave-optically designed complex transmission masks

著者名:

Buhling,S. ( LightTrans GmbH )

掲載資料名:

Lithography for semiconductor manufacturing II : 30 May-1 June, 2001, Edinburgh, UK

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

4404

発行年:

2001

開始ページ:

221

終了ページ:

230

総ページ数:

10

出版情報:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819441058 [0819441058]

言語:

英語

請求記号:

P63600/4404

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00012120
シリーズID:	PA00000029
会議名:	Microelectronic Manufacturing Technologies : Lithography for Semiconductor Manufacturing
回次:	2001 : 2nd
会議開催地:	Edinburgh, UK
会議開催年:	2001.05.30-2001.06.01

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