Al+ and N+ implantation in silicon carbide: a role of point defect clusters in defect evolution
- 著者名:
- Rybin,P.V. ( St. Petersburg State Technical Univ. )
- Kulikov,D.V.
- Trushin,Yu.V.
- Petzoldt,J.
- 掲載資料名:
- Fourth International Workshop on Nondestructive Testing and Computer Simulations in Science and Engineering
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 4348
- 発行年:
- 2000
- 開始ページ:
- 257
- 終了ページ:
- 263
- 総ページ数:
- 7
- 出版情報:
- Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819440372 [081944037X]
- 言語:
- 英語
- 請求記号:
- P63600/4348
- 資料種別:
- 国際会議録
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