Long-time radiation-resistant optical coatings for UV excimer laser applications
- 著者名:
- Laux,S. ( JENOPTIK Laser, Optik, Systeme GmbH )
- Bernitzki,H.
- Klaus,M.
- Lauth,H.
- Kaiser,N.
- 掲載資料名:
- Laser-induced damage in optical materials, 2000 : 32nd Annual Boulder Damage Symposium, proceedings, 16-18, October, 2000, Boulder, Colorado
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 4347
- 発行年:
- 2000
- 開始ページ:
- 13
- 終了ページ:
- 16
- 総ページ数:
- 4
- 出版情報:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819440365 [0819440361]
- 言語:
- 英語
- 請求記号:
- P63600/4347
- 資料種別:
- 国際会議録
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7
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Properties of fluoride DUV excimer laser optics:influence of the number of dielectric layers
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