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LAVA web-based remote simulation: enhancements for education and technology innovation

著者名:
Lee,S.I. ( Univ. of California/Berkeley )
Ng,K.C.
Orimoto,T.
Pittenger,J.
Horie,T.
Adam,K.
Cheng,M.
Croffie,E.H.
Deng,Y.
Gennari,F.
Pistor,T.V.
Robins,G.
Williamson,M.
Wu,B.
Yuan,L.
Neureuther,A.R.
さらに 11 件
掲載資料名:
Optical Microlithography XIV
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
4346
発行年:
2001
巻:
4346
パート:
Two of Two Parts
開始ページ:
1500
終了ページ:
1506
総ページ数:
7
出版情報:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819440327 [0819440329]
言語:
英語
請求記号:
P63600/4346
資料種別:
国際会議録

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