Capacitive micropressure sensors with underneath readout circuit using a standard CMOS process
- 著者名:
- 掲載資料名:
- Smart structures and materials 2001 : smart electronics and MEMS : 5-7 March, 2001, Newport Beach, USA
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 4334
- 発行年:
- 2001
- 開始ページ:
- 336
- 終了ページ:
- 344
- 総ページ数:
- 9
- 出版情報:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819440204 [0819440205]
- 言語:
- 英語
- 請求記号:
- P63600/4334
- 資料種別:
- 国際会議録
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