Performance improvement of rf MEMS capacitive switches with high-dielectric-constant materials

Performance improvement of rf MEMS capacitive switches with high-dielectric-constant materials

著者名:

Yoon,H. ( The Pennsylvania State Univ. )

掲載資料名:

Smart structures and materials 2001 : smart electronics and MEMS : 5-7 March, 2001, Newport Beach, USA

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

4334

発行年:

2001

開始ページ:

38

終了ページ:

45

総ページ数:

8

出版情報:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819440204 [0819440205]

言語:

英語

請求記号:

P63600/4334

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00012050
シリーズID:	PA00000029
会議名:	Smart structures and materials
回次:	2001
会議開催地:	Newport Beach, CA, USA
会議開催年:	2001.03.05-2001.03.07

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