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Integration possibilities with MOEMS/MEMS devices and packaging technologies using a MEMS simulation tool

著者名:
掲載資料名:
Optoelectronic Integrated Circuits and Packaging V
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
4290
発行年:
2001
開始ページ:
116
終了ページ:
127
総ページ数:
12
出版情報:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819439680 [0819439681]
言語:
英語
請求記号:
P63600/4290
資料種別:
国際会議録

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