Silicon as a substrate in multiwafer MOVPE GaN technology
- 著者名:
Alam,A. ( AIXTRON AG ) Schineller,B. Protzmann,H. Lunenburger,M. Heuken,M. Bremser,M.D. Woelk,E. Dadgar,A. Krost,A. - 掲載資料名:
- Light-Emitting Diodes: Research, Manufacturing, and Applications V
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 4278
- 発行年:
- 2001
- 開始ページ:
- 158
- 終了ページ:
- 164
- 総ページ数:
- 7
- 出版情報:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819439567 [0819439568]
- 言語:
- 英語
- 請求記号:
- P63600/4278
- 資料種別:
- 国際会議録
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