High-resolution noncontact thermal characterization of semiconductor devices

High-resolution noncontact thermal characterization of semiconductor devices

著者名:

Christofferson,J. ( Univ. of California/Santa Cruz )
Vashaee,D.
Shakouri,A.
Melese,P.

掲載資料名:

Metrology-based Control for Micro-Manufacturing

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

4275

発行年:

2001

開始ページ:

119

終了ページ:

125

総ページ数:

7

出版情報:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819439536 [0819439533]

言語:

英語

請求記号:

P63600/4275

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00011991
シリーズID:	PA00000029
会議名:	SPIE LASE : Metrology-based control for micro-manufacturing
回次:	2001
会議開催地:	San Jose, CA, USA
会議開催年:	2001.01.24-2001.01.25

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