Depth-image-based surface measurement sensor

Depth-image-based surface measurement sensor

著者名:

Yu,X. ( Harbin Univ. of Science and Technology )
Wei,Z.
Yu,G.
Zhang,F.
Wu,L.

掲載資料名:

Metrology-based Control for Micro-Manufacturing

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

4275

発行年:

2001

開始ページ:

94

終了ページ:

98

総ページ数:

5

出版情報:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819439536 [0819439533]

言語:

英語

請求記号:

P63600/4275

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00011991
シリーズID:	PA00000029
会議名:	SPIE LASE : Metrology-based control for micro-manufacturing
回次:	2001
会議開催地:	San Jose, CA, USA
会議開催年:	2001.01.24-2001.01.25

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