Absolute shape control of microcomponents using digital holography and multiwavelength contouring
- 著者名:
- Osten,W. ( Bermen Institute of Applied Beam Technology )
- Seebacher,S.
- Baumbach,T.
- Juptner,W.P.
- 掲載資料名:
- Metrology-based Control for Micro-Manufacturing
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 4275
- 発行年:
- 2001
- 開始ページ:
- 71
- 終了ページ:
- 84
- 総ページ数:
- 14
- 出版情報:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819439536 [0819439533]
- 言語:
- 英語
- 請求記号:
- P63600/4275
- 資料種別:
- 国際会議録
類似資料:
SPIE - The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
10
国際会議録
Combined measurement of silicon microbeams by grating interferometry and digital holography
SPIE--International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |