Dynamics and mechanism of discrete etching of organic materials by femtosecond laster excitation
- 著者名:
- Hosokawa,Y. ( Osaka Univ. )
- Yashiro,M.
- Asahi,T.
- Masuhara,H.M.
- 掲載資料名:
- Laser Applications in Microelectronic and Optoelectronic Manufacturing VI
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 4274
- 発行年:
- 2001
- 開始ページ:
- 78
- 終了ページ:
- 87
- 総ページ数:
- 10
- 出版情報:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819439529 [0819439525]
- 言語:
- 英語
- 請求記号:
- P63600/4274
- 資料種別:
- 国際会議録
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