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Tuning dielectric constant and Young's modulus by nanofabrication

著者名:
掲載資料名:
Design, modeling, and simulation in microelectronics : 28-30 November 2000, Singapore
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
4228
発行年:
2000
開始ページ:
302
終了ページ:
308
総ページ数:
7
出版情報:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819439000 [0819439002]
言語:
英語
請求記号:
P63600/4228
資料種別:
国際会議録

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