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Integrated Gettering of Metallic Contaminants by Nanocavities in FZ Silicon Wafers

著者名:
掲載資料名:
High Purity Silicon VI : proceedings of the sixth International Symposium
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
4218
発行年:
2000
開始ページ:
341
終了ページ:
347
総ページ数:
7
出版情報:
Pennington, N.J. — Bellingham, Wash.: Electrochemical Society — SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9781566772846 [1566772842]
言語:
英語
請求記号:
P63600/4218
資料種別:
国際会議録

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