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Micromotion measurement system for millistructure using diffraction grating

著者名:
掲載資料名:
Optomechatronic systems : 5-6 November 2000, Boston, USA
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
4190
発行年:
2000
開始ページ:
71
終了ページ:
79
総ページ数:
9
出版情報:
Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819438553 [0819438553]
言語:
英語
請求記号:
P63600/4190
資料種別:
国際会議録

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