Amorphous silicon crystallization by a long-pulse excimer laser
- 著者名:
Lazzaro,P.Di. Bollanti,S. Bonfigli,F. Flora,F. Giordano,G. Letardi,T. Murra,D. Zheng,C.E. Baldesi,A. - 掲載資料名:
- XIII International Symposium on Gas Flow and Chemical Lasers and High-Power Laser Conference : 18-22 September 2000
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 4184
- 発行年:
- 2000
- 開始ページ:
- 525
- 終了ページ:
- 529
- 総ページ数:
- 5
- 出版情報:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819438478 [0819438472]
- 言語:
- 英語
- 請求記号:
- P63600/4184
- 資料種別:
- 国際会議録
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9
国際会議録
"Krypton as filter for ions, debris, and useless radiation in EUV projection lithography systems"
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |