Feasibility and applicability of integrated metrology using spectroscopic ellipsometry in a cluster tool
- 著者名:
Boher,P. Pickering,C. Tarnowka,A. Piel,J.-P. Evrard,P. Stehle,J.-L.P. - 掲載資料名:
- Process Control and Diagnostics
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 4182
- 発行年:
- 2000
- 開始ページ:
- 115
- 終了ページ:
- 123
- 総ページ数:
- 9
- 出版情報:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819438430 [081943843X]
- 言語:
- 英語
- 請求記号:
- P63600/4182
- 資料種別:
- 国際会議録
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