Anodic oxidation and reliability of MEMS polysilicon electrodes at high relative humidity and high voltages

Anodic oxidation and reliability of MEMS polysilicon electrodes at high relative humidity and high voltages

著者名:

Shea,H.R.

掲載資料名:

MEMS Reliability for Critical Applications

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

4180

発行年:

2000

開始ページ:

117

終了ページ:

122

総ページ数:

6

出版情報:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819438362 [0819438367]

言語:

英語

請求記号:

P63600/4180

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00011899
シリーズID:	PA00000029
会議名:	Micromachining and Microfabrication : MEMS reliability for critical applications
回次:	2000
会議開催地:	Santa Clara, CA, USA
会議開催年:	2000.09.20

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