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Failure analysis of tungsten-coated polysilicon micromachined microengines

著者名:
Walraven,J.A.
Mani,S.S.
Fleming,J.G.
Headley,T.J.
Kotula,P.G.
Pimentel,A.A.
Rye,M.J.
Tanner,D.M.
Smith,N.F.
さらに 4 件
掲載資料名:
MEMS Reliability for Critical Applications
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
4180
発行年:
2000
開始ページ:
49
終了ページ:
57
総ページ数:
9
出版情報:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819438362 [0819438367]
言語:
英語
請求記号:
P63600/4180
資料種別:
国際会議録

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