Fabrication of refractive microlens array by etching ammonium dichromate gelatin (ADG) with enzyme
- 著者名:
Yao,J. Gao,F. Zhang,Y. Su,J. Guo,Y. Cui,Z. - 掲載資料名:
- Micromachining technology for micro-optics : 20 September 2000, Santa Clara, USA
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 4179
- 発行年:
- 2000
- 開始ページ:
- 123
- 終了ページ:
- 127
- 総ページ数:
- 5
- 出版情報:
- Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819438355 [0819438359]
- 言語:
- 英語
- 請求記号:
- P63600/4179
- 資料種別:
- 国際会議録
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3
国際会議録
One-step lithography for fabrication of a hybrid microlens array using a coding gray-level mask
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