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MOEMS pressure sensors for propulsion applications

著者名:
掲載資料名:
MOEMS and miniaturized systems : 18-20 September 2000, Santa Clara, USA
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
4178
発行年:
2000
開始ページ:
380
終了ページ:
386
総ページ数:
7
出版情報:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819438348 [0819438340]
言語:
英語
請求記号:
P63600/4178
資料種別:
国際会議録

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