RF MEMS microswitches design and characterization
- 著者名:
- 掲載資料名:
- Materials and Device Characterization in Micromachining III
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 4175
- 発行年:
- 2000
- 開始ページ:
- 149
- 終了ページ:
- 157
- 総ページ数:
- 9
- 出版情報:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819438317 [0819438316]
- 言語:
- 英語
- 請求記号:
- P63600/4175
- 資料種別:
- 国際会議録
類似資料:
1
国際会議録
"Concepts, characterization, and modeling of MEMS microswitches with gold contacts in MUMPs"
SPIE-The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
American Institute of Aeronautics and Astronautics |
SPIE-The International Society for Optical Engineering |
American Institute of Aeronautics and Astronautics |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |