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Fabrication of surface-micromachined thermally driven micropump by anhydrous HF gas-phase etching with 2-propanol

著者名:
掲載資料名:
Micromachining and microfabrication process technology VI : 18-20 September 2000, Santa Clara, USA
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
4174
発行年:
2000
開始ページ:
444
終了ページ:
450
総ページ数:
7
出版情報:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819438300 [0819438308]
言語:
英語
請求記号:
P63600/4174
資料種別:
国際会議録

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