Blank Cover Image

Repair of stiction-failed surface-micromachined polycrystalline silicon cantilevers using pulsed lasers

著者名:
掲載資料名:
Micromachining and microfabrication process technology VI : 18-20 September 2000, Santa Clara, USA
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
4174
発行年:
2000
開始ページ:
279
終了ページ:
287
総ページ数:
9
出版情報:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819438300 [0819438308]
言語:
英語
請求記号:
P63600/4174
資料種別:
国際会議録

類似資料:

1 国際会議録 Experimental and computational study on laser heating of surface micromachined cantilevers [6111-09]

Phinney, L. M., Spahn. O. B., Wong, C. C.

SPIE - The International Society of Optical Engineering
7 国際会議録 Micro nano technology visualization (MNTV) of micromachined MEMS polysilicon structures

Lawton,R.A., Lin,G., Wellman,J., Phinney,L.M., Uribe,J., Griffith,E., Wolf,I.De, Lawrence,E.

SPIE-The International Society for Optical Engineering
2 国際会議録 Surface characterization and adhesion analysis for polysilicon micromachined flaps

Xue, X., Phinney, L.M.

SPIE-The International Society for Optical Engineering
8 国際会議録 Silicon microstructuring using ultrashort laser pulses

Zhu, J., Li, W., Zhao, M., Yin, G., Chen, X., Chen, D., Zhao, L.

SPIE - The International Society of Optical Engineering
3 国際会議録 Use of thermal cycling to reduce adhesion of OTS coated coated MEMS cantilevers

Ali, S.M., Phinney, L.M.

SPIE-The International Society for Optical Engineering
9 国際会議録 Damage of MEMS thermal actuators heated by laser irradiation

Phinney, L.M., Klody, K.A., Sackos, J.T., Walraven, J.A.

SPIE - The International Society of Optical Engineering
4 国際会議録 Stiction in Surface Micromachined Structures

Bhattacharya, E., Kuang, J., Judy, M., Martin, J.

SPIE-The International Society for Optical Engineering
10 国際会議録 Effects of Surface and Interlayer Processing Conditions on Selected Ohmic Contact Metallizations for p-Type Silicon Carbide

Porter, L.M., Jang, T., Worren, T., Chang, K.C., Papanicolaou, N.A., Erickson, J.W.

Materials Research Society
5 国際会議録 Investigation of adhesion during operation of MEMS cantilevers

Ali, S.M., Phinney, L.M.

SPIE - The International Society of Optical Engineering
11 国際会議録 Oxygen in Silicon

Corbett,J.W., Deak,P., Lindstrom,J.L., Roth,L.M., Snyder,L.C.

Trans Tech Publications
6 国際会議録 Effects of temperature on surface adhesion in MEMS structures

Jennings,J.M., Phinney,L.M.

SPIE-The International Society for Optical Engineering
12 国際会議録 Design and fabrication of optical MEMS using a four-level planarized surface-micromachined polycrystalline silicon process

Michalicek,M.A., Comtois,J.H., Schriner,H.K.

SPIE-The International Society for Optical Engineering
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12