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"Design, fabrication, and characterization of broadhand multilayer mirrors for EUV optics at normal incidence"

著者名:
Wang,Z.
Kun,C.
Ma,Y.
Chen,B.
Cao,J.
Zhou,Z.
Chen,X.
Michette,A.G.
さらに 3 件
掲載資料名:
Soft X-ray and EUV imaging systems : 3-4 August 2000, San Diego, USA
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
4146
発行年:
2000
開始ページ:
83
終了ページ:
90
総ページ数:
8
出版情報:
Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819437914 [0819437913]
言語:
英語
請求記号:
P63600/4146
資料種別:
国際会議録

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