THIN FILM INHOMOGENEITY CHARACTERIZATION BY ION BEAM TECHNIQUE

THIN FILM INHOMOGENEITY CHARACTERIZATION BY ION BEAM TECHNIQUE

著者名:

掲載資料名:

Plasma-surface interactions and processing of materials

シリーズ名:

NATO ASI series. Series E, Applied sciences

シリーズ巻号:

176

発行年:

1990

開始ページ:

335

終了ページ:

338

総ページ数:

4

出版情報:

Dordrecht: Kluwer Academic Publishers

ISSN:

0168132X

ISBN:

9780792305842 [0792305841]

言語:

英語

請求記号:

N11482/176

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00021035
シリーズID:	PA00000018
会議名:	NATO Advanced Study Institute on Plasma-Surface Interactions and Processing of Materials
回次:	1988
会議開催地:	Alicante, Spain
会議開催年:	1988.09.04-1988.09.16

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