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Fluid, Kinitic and Hybrid Simulation Strategies for Modeling Chemically Complex Inductively Coupled Plasmas

著者名:
掲載資料名:
Electron Kinetics and applications of glow discharges
シリーズ名:
NATO ASI series. Series B, Physics
シリーズ巻号:
367
発行年:
1998
開始ページ:
349
終了ページ:
366
総ページ数:
18
出版情報:
New York: Lenum Press
ISBN:
9780306458224 [0306458225]
言語:
英語
請求記号:
N11479/367
資料種別:
国際会議録

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