Resonance measurements of stresses in AI/Si3N4 microribbons
- 著者名:
- Payne,A.P. ( Silicon Light Machines )
- Staker,B.P.
- Gudeman,C.S.
- Daneman,M.J.
- Peter,D.E.
- 掲載資料名:
- MEMS reliability for critical and space applications : 21-22 September 1999, Santa Clara, California
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 3880
- 発行年:
- 1999
- 開始ページ:
- 90
- 終了ページ:
- 100
- 出版情報:
- Bellingham, Washington: SPIE - The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819434777 [0819434779]
- 言語:
- 英語
- 請求記号:
- P63600/3880
- 資料種別:
- 国際会議録
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3
国際会議録
Residual stress measurements with laser speckle correlation interferometry and local heat treating
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Electrochemical Society |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |
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SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |