Strength of polysilicon for MEMS devices
- 著者名:
- LaVan,D.A. ( Sandia National Labs. )
- Buchheit,T.E.
- 掲載資料名:
- MEMS reliability for critical and space applications : 21-22 September 1999, Santa Clara, California
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 3880
- 発行年:
- 1999
- 開始ページ:
- 40
- 終了ページ:
- 44
- 出版情報:
- Bellingham, Washington: SPIE - The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819434777 [0819434779]
- 言語:
- 英語
- 請求記号:
- P63600/3880
- 資料種別:
- 国際会議録
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