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Failure analysis of worn surface-micromachined microengines

著者名:
掲載資料名:
MEMS reliability for critical and space applications : 21-22 September 1999, Santa Clara, California
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
3880
発行年:
1999
開始ページ:
30
終了ページ:
39
出版情報:
Bellingham, Washington: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819434777 [0819434779]
言語:
英語
請求記号:
P63600/3880
資料種別:
国際会議録

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