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PbZr0.52Ti0.48O3 ferroelectric thin films on silicon by KrF excimer laser ablation

著者名:
掲載資料名:
Materials for smart systems III : symposium held November 30-December 2, 1999, Boston, Massachusetts, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
604
発行年:
2000
開始ページ:
239
出版情報:
Pittsburgh, PA: MRS-Materials Research Society
ISSN:
02729172
ISBN:
9781558995123 [1558995129]
言語:
英語
請求記号:
M23500/604
資料種別:
国際会議録

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